MICROKLEAN PLASMA ASHER
Other Products
MICROKLEAN PLASMA ASHER µK-180R
MicroKlean Downstream Plasma Asher µK-180R is a plasma cleaner used to eliminate hydrocarbon contamination from Electron Microscopy specimen as well as specimen holders in a gentle process.
- Chamber: Stainless steel Chamber 180 mm length x 180 mm width x 50 mm high. Chamber has two TEM holder ports to enable loading and unloading of TEM specimen. Chamber has front view port for visualization of plasma process.
- Remote Plasma Source: The MicroKlean system incorporates Mascotek’s Proprietary Remote Plasma Source RPS-40 which is an RF powered inductively coupled plasma source. The RPS-40 generates the plasma remotely and only the reactive species such as radicals are introduced inside the MicroKlean chamber there by significantly reducing any ion bombardment on the specimen. Atomic oxygen radicals eliminate contamination by converting the surface carbon into volatile gas species which are pumped out of the chamber.
- Mass Flow Controllers: Plasma generation using Mass Flow Controllers for Argon, Oxygen and optionally available Hydrogen gas having range up to 100sccm
- Power Supply: Adjustable RF power up to 75W @ 13.56MHz with manual impedance matching network
- Pumping System: Rotary vacuum pump of 8m3/hr suitable to get ultimate vacuum better than 2 x 10^-2 mbar. Dry vacuum pump of 6m3/hr is optionally available
- Vacuum gauge: Pirani gauge to measure from atmosphere up to 1 x 10^-3 mbar is provided
- Cabinet & Controller: PLC with 4” touch screen HMI to enable selection of Manual or Automatic sequential operation. Control will be conveniently located in one single standalone cabinet with necessary safety interlocks for ‘User Friendly’ operation. If required the system can be offered as a table top version with floor mounted pump.
- Standalone/ tabletop (if desired) downstream plasma cleaner
- Adjustable RF power up to 75W @13.56MHz
- Plasma generation using Argon, Oxygen and optionally available Hydrogen process gases
- Suitable to clean TEM samples including carbon coated copper grids as well as TEM holders
- Suitable to clean specimen sensitive to heat or ion damage (MicroKlean is suitable to clean holey carbon grids with minimal damage)
- System incorporates interlocks for user and lab safety
- µK-180R: Rotary vacuum pump version MicroKlean Plasma Asher capable of reaching ultimate vacuum better than 2 x 10^-2 mbar
- µK-180T: Turbo pump version MicroKlean Plasma Asher capable of reaching ultimate vacuum better than 5x10^-5 mbar
230VAC, 50 Hz
L 740mm x W 640mm x H 1300mm
