• Chamber:
  Stainless steel Chamber 200 mm length x 200 mm width x 56 mm high. Chamber incorporate two ports to load and unload TEM holders for cleaning TEM specimen and holders. Chamber has front view port for visualization of plasma process. Chamber for cleaning of SEM samples is available optionally.
• Remote Plasma Source:
  The MicroKlean system incorporates Mascotek’s Remote Plasma Source RPS-40 which is an RF powered inductively coupled plasma source.
  The RPS-40 generates the plasma remotely and only the reactive species such as radicals are introduced inside the MicroKlean chamber there by significantly reducing any ion bombardment on the specimen. Atomic oxygen radicals eliminate contamination by converting the surface carbon into volatile gas species which are pumped out of the chamber.
• Mass Flow Controllers:
  Plasma generation using Mass Flow Controllers for Argon, Oxygen and optionally available Hydrogen gas having range up to 100sccm
• Power Supply: Adjustable RF power up to 75W @ 13.56MHz with manual impedance matching network
• Pumping System:
  Dry scroll pump of 6m³/hr suitable to get ultimate vacuum better than 5 x 10⁻² mbar.
• Vacuum gauge:
  Pirani gauge to measure from atmosphere up to 1 x 10⁻³mbar
• Cabinet & Controller:
  PLC with 4” touch screen HMI to enable selection of manual or automatic sequential operation. Control is located in one single tabletop cabinet with necessary safety interlocks for ‘User Friendly’ operation. Suitable for cleaning TEM samples, including carbon-coated copper grids and TEM holders, and for cleaning specimens sensitive to heat or ion damage (MicroKlean is suitable for cleaning holey carbon grids with minimal damage).

1. µK-180R:

Dry scroll pump version MicroKlean Plasma Asher capable of reaching ultimate vacuum better than 5x10⁻² mbar

2. µK-180T:

Turbo pump version MicroKlean Plasma Asher capable of reaching ultimate vacuum better than 5x10⁻⁵ mbar

 230VAC, 50Hz

L 610mm x W 605mm x H 580mm