SEM Sputter Coater
SC 120R
- Borosilicate glass chamber ø 120 mm x 120 mm high
- Hinged top flange for easy loading & unloading of specimen and exchange of targets
- Chamber base pressure 5 x 10⁻² mbar, operating pressure 0.1 torr up to 0.5 torr
- Magnetron source target ø 57 mm, 0.1 mm up to 0.3 mm thick
- Discharge gas Air/Argon
- Current adjustable within 10 mA to 80 mA
- Digital timer to set the sputter time from 5 to 100 sec
- Specimen holder to hold 7 SEM stubs of ø 12.5 mm
- PLC with 4” touch screen HMI with manual & auto control
Power Requirements
230 VAC, 50 Hz /
120 VAC, 60 Hz
Dimensions
L 400mm X W 410mm X H 435mm