Broad Ion Beam Polishing System
BIPS 1503
Ion Milling Chamber
- Manufactured from single block machined Aluminum
- Base pressure of 5 X 10⁻⁶ mbar or better
Argon Ion Source IS203 for Flat Polishing (EBSD)
- Water-cooled Inductively coupled RF Type Ion Source
- Special grid optics generates a converging ion beam profile
- Generates minimum 200 mm² uniform polished specimen area
- Beam energy controllable up to 1000 eV
- Ion source current controllable up to 5 mA
- Dedicated gas inlet
- Operating pressure range 8 X 10⁻⁵ mbar to 2 X 10⁻⁴ mbar
Holder for EBSD Specimen Flat Polishing
- Max. ø 25 mm X 20 mm high (when using both IS203 & IS18HV sources)
- Max. ø 50 mm X 20 mm high (when using only IS203 source)
- Suitable for Bakelite mounted or unmounted specimen
- Specimen holder rotation up to 5 rpm
- Minimum ion beam incident angle of 1° up to max. 20°
Argon Ion Source IS18HV for cross section milling:
- Water-cooled hot cathode high voltage ion source
- Generates collimated beam of ø 2mm
- Voltage range: 2 keV up to 8 keV
- Maximum source current: 5 mA
- Ion beam current: 0 – 100 µA
- Dedicated gas inlet
- Operating pressure range 8 X 10⁻⁶ mbar to 2 X 10⁻⁵ mbar
Specimen Holders for cross section and slope cutting
- Specimen Holder for 90° Cross-Section Milling with sputter mask
- Specimen Holder for 30° Slope cutting with sputter mask
- 90° C holder holds max. 15 mm L X 15 mm W X 5 mm thick specimen
- 30° CS holder holds max. 15 mm L X 15 mm W X 2 mm thick specimen
- Both specimen holders can be oscillated within ± 45°
- Ion beam incident angle of 1° up to max. 20°
SEM EBSD Flat Ion Polishing
CROSS SECTION SEM ION MILLING
Applications:
- ➢Polishing of backscatter diffraction (EBSD) specimen
- ➢Milling of cross section of Scanning Electron Microscopy Specimen (SEM)
- ➢Polishing of Focused Ion Beam (FIB) Milled Specimen (Under development)
- ➢Polishing of Atom Probe Tomography (APT) coupons (Under development)
HD CMOS Camera:
Real time display with image & video capturing function
Specimen Cooling:
Thermal contacts with Liquid Nitrogen media cools specimen up to −20°C
User Interface:
Process control done using PLC with 7” touch screen HMI
Power Requirements
230 VAC, 50 Hz /
120 VAC, 60 Hz
Dimensions
L 900mm x W 800mm x H 1300mm