• MicroKlean Plasma Asher incorporates Mascotek’s Proprietary Remote Plasma Source RPS-40
• RPS-40 generates the plasma remotely and only the reactive species such as radicals are introduced inside the MicroKlean chamber thereby significantly reducing any ion bombardment on the specimen
• Suitable to clean SEM samples, TEM samples including carbon coated copper grids as well as TEM holders
• SEM specimen can be mounted using front opening door
• Chamber has three TEM holder ports to enable loading and unloading of TEM specimen
• Suitable to clean all specimen including sensitive to heat or ion damage
• Plasma generation using Argon, Oxygen and optionally available Hydrogen process gases
• Adjustable RF power @13.56MHz from 10W to 100W

Versions Available:

• µK-180R: Rotary Pump version (Dry scroll pump optionally available) MicroKlean Plasma Asher capable of reaching ultimate vacuum better than 5 x 10^-2 mbar
• µK-180T: Turbo pump version MicroKlean Plasma Asher capable of reaching ultimate vacuum better than 5×10^-5 mbar